- Items
- Specification
- Diameter
- 150±0.2 mm
- LN/LT Crystal Orientation
- X°±0.3°
- LN/LT Layer Thickness
- (300~600 nm) ±20 nm
- Front Side Surface Finish
- <0.5 nm
- Buried Oxide Layer Thickness
- (500~8200 nm) ±20 nm
- Si Orientation
- <100>
- TTV
- ≤5 μm
- BOW
- -40~40 μm
- Warp
- ≤50 μm
- Total Thickness
- 675±25 μm
- Items
- Specification
- Diameter
- 200±0.2 mm
- LN/LT Crystal Orientation
- X°±0.3°
- LN/LT Layer Thickness
- (300~600 nm)±20 nm
- Front Side Surface Finish
- <0.5 nm
- Buried Oxide Layer Thickness
- (500~8200nm)±20nm
- Si Orientation
- <100>
- TTV
- ≤5 μm
- BOW
- -50~50 μm
- Warp
- ≤50 μm
- Total Thickness
- 725±25 μm


























